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Advanced Control Design of Mems Vibratory Gyroscopes (Electrical Engineering Developments)

Juntao Fei




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 | #6714376 in Books |  2011-09-01 | Original language:English | PDF # 1 |  8.75 x6.00 x.50l,.80 | File type: PDF | 180 pages

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MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular...

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