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Computational Explorations in Magnetron Sputtering

E. J. McInerney




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 | #732468 in Books |  2014-10-31 | Original language:English |  9.00 x.36 x6.00l, | File type: PDF | 156 pages

||About the Author|Jack McInerney is a senior staff scientist in the Computational Modeling group of Lam Research. His computational explorations have ranged broadly from barbecuing meat to plasma physics. He has authored over 30 technical papers and holds more t

Magnetron Sputtering is a widely used industrial process for depositing thin films. PVD films are found in everything from the moisture barriers in potato chip bags to the interconnects of modern semiconductor devices. This book walks you through the physics of Magnetron Sputtering in a step-by-step fashion. Starting with the magnetic fields crucial to efficient operation, the book then looks at the electric fields that power the sputter process, the motion of electro...

You can specify the type of files you want, for your device.Computational Explorations in Magnetron Sputtering   |  E. J. McInerney. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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