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MEMS, BioMEMS and Bioelectronics - Materials and Devices: Volume 1415 (MRS Proceedings)

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 | #10050653 in Books |  Materials Research Society |  2012-07-09 | Original language:English | PDF # 1 |  8.98 x.63 x5.98l,1.05 | File type: PDF | 236 pages

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Symposium TT, "Microelectromechanical Systems-Materials and Devices V," held from November 28-30, 2011 at the 2011 MRS Fall Meeting in Boston, Massachusetts, explored the fabrication, integration, characterization, and application of small-scale electro-mechanical, thermal, magnetic, fluidic, and optical sensors and actuators. The scope of this multidisciplinary symposium emphasized efforts ranging from fundamental research to implementation in industry. Symposium II, "B...

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