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Multilayer Integrated Film Bulk Acoustic Resonators

Yafei Zhang, Da Chen




[PDF.et32] Multilayer Integrated Film Bulk Acoustic Resonators

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 |  2014-09-19 |  2014-09-20 | Original language:English | PDF # 1 |  9.25 x.37 x6.10l,.53 | File type: PDF | 154 pages

||From the Back Cover||Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the m

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. The...

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